model:001-4130-03

Technical specifications:

Alignment accuracy:

X/Y direction: ± 2 microns.

θ direction: ± 0.1 milliradians.

The alignment accuracy mentioned by other sources is ± 0.1 micrometers.

Repeatability:

X/Y direction: 0.5 microns.

θ direction: 0.05 milliradians.

Scanning range:

X/Y direction: ± 20 millimeters.

θ direction: ± 5 degrees.

Speed:

X/Y direction: 100 millimeters per second.

θ direction: 10 degrees per second.

Control accuracy:

Nano level positioning accuracy.

Environmental tolerance:

Working temperature range: -40 ° C to 85 ° C.

Protection level: shockproof, dustproof, moisture-proof.

compatibility:

Compatible with various wafer sizes and materials, suitable for multiple wafer processing techniques.

Application Cases

Brooks Automation 001-4130-03 touch screen panel is widely used in semiconductor manufacturing, automated testing, and other high-tech industries. Specific applications include:

Semiconductor manufacturing:

Used for wafer alignment operations to ensure high-precision wafer processing.

Suitable for wafer alignment operations in microelectronic device manufacturing processes such as LED, MEMS, and solar cells.

Automated testing:

Realize precise motion control and process control, suitable for various automated testing scenarios.

Other high-tech industries:

It also has applications in fields such as life sciences, providing high-precision, high reliability, and easy-to-use wafer alignment solutions.

Brooks Automation 001-4130-03 touch screen panels play an important role in semiconductor manufacturing and other high-tech industries due to their high precision, high repeatability, and wide compatibility.

Mail :elora16811@gmail.com
Phone/Wechat/Whatsapp : +86 13265023130